Canon FPA-2500i3

OEM Model Description

FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM

Numerical Aperture: 0.60 / 0.52

Image Field: 20 mm [(X)11.14mm x (Y)26mm)

Printing Wavelength: i-line (365 nm)

Resolution:0.40μm

Illumination Lamp: 1.5 kW super-high-pressure mercury lamp

Illumination Uniformity: < ±1.2 %

Current Wafer Size: 6”(4”, 5” and 8” Sizes Available)

Magnification: X 1/5