2000 NIKON NSR S-203B Stepper

As Is, but was in Working Condition before De-Installation.

HDDs removed when de-installed, otherwise, it’s complete.

Pumps, Chillers & Abatement are all excluded.

Tool Status De-Installed

Wafer Size 200 mm

Fab Section Lithography

Asset Description Photolithography Scanner 248nm

CIM SECS

Process Photolithography

Main System NSR S203B 1

Handler System WL Type 3 1

Factory Interface Open Cassette 1

No.2 (warm idled 1Q 2025)

IU Flare = 0.84%

Lens Flare = 8.50%

Uniformity = 6.00%

Power = 541 mW/cm2

Total Focus Deviation = 0.202 µm

Astigmatism = 0.119 µm

Coma = 0.040 µm

Iso DOF = .275 µm