2023 LAM 2300 3 Chambers Etch System Including Exelan Flex45 Dielectric Etch Chamber

Installed.

Unused Since Installation/Qualification

It’s in Working Condition.

Process Capabilities : Dielectric Etch/Metal Etch/Microwave Strip

Wafer : Set Up for 200 mm (Maximum 300 mm)

Vintage : 2023

CE Mark

All Pumps, Generators & Other Subsystems Included

Chambers are :

2300 Platform V2 Etch Transfer Module

3ea 200mm Open Cassette Loadports

Front & Side User Interface Monitors

CDM Wafer Handling Robot

2300 Exelan Flex45 Dielectric Etch Process Module

OES 2 End Point Detection

Low Temperature ESC

Boce 2700 LPM Turbo Pump

16 Regulated Gas Channels

Versys HP Metal Etch Process Module

OES 2 End Point Detection

Boce 2200 LPM Turbo Pump

16 Regulated Gas Channels

Microwave Stripper Process Module

On Board Gas System

3 Regulated Gas Channels