2010 LAM Vector Extreme

Wafer size 12 inch

Config FI / Main Frame / Load Port / AC Rack / Vector Extreme Process Chamber(2) ( SION, ARC, USG Process )

Note 4 Load Port, ATM Robot: Brooks , VAC Robot: Brooks Mag 8, Trust 2 AXIS Spindle, HF Gen: APEX3013, LF Gen: PDX2500, RPS: AX7685-33

Vintage 02/22/2010