AMAT Centura DPS_Metal

Wafer size 8 inch

Config Main Frame: Phase II / Control Rack, Main AC Rack, Gen Rack: Short Body / Metal Process Chamber(2) / ASP Process Chamber(2)

Note Missing: Metal Upper Chamber, Xfer Lid, Robot Arm Wrist, PCBs, Generators, AC Distributor Controller, ASP Chamber Lamp Assy...