AMAT P5000 CVD
AMAT P5000 CVD
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Description
Wafer size 8 inch
Config DCVD Process Chamber(3) / AC Rack / Transfomer / ATM Wafer Loader / Monitor Rack / Scrubber / Dry Pump(2) / Dry Pump Booster(3)
Note Missing: Lamp Module(2), Xfer Robot Assy, PCBs
Specifications
| Manufacturer | AMAT |
| Model | P5000 CVD |
| Condition | Used |
| Stock Number | BM6407 |