2000 AMAT DPS METAL

3 available

Wafer size 8 inch

Config Main Frame: Centura Phase II / Control Rack: 84" Common Controller/ Gen Rack: STD Type/ Endpoint Cart: 56" Stand Alone / Metal DPS R1 Process Chamber(2) / ASP+ Process Chamber(2) / Orient Chamber(1) / STD Cool Down Chamber(1)

Note LL : Wide Body / Xfer Robot: VHP+ / Gas Panel: Top Feed Muti Line Drop

Vintage 2000 / 1999 / 2004