FEI Helios Nanolab 460F1

Process Type: FA SEMs/TEMs/Dual Beams

Status: Refurbished

Specifications:

Electron Source – TFE Elstar electron column with UC monochromator

Ion Source – Tomahawk

• Landing Voltage

– 10 V - 30 kV SEM

– 500 V - 30 kV FIB

• STEM resolution

– 0.6 nm

• SEM resolution

– Optimal WD

0.6 nm @ 15 kV

0.7 nm @ 1 kV

1.5 nm @ 200 V with beam decleration

• Ion beam resolution

– 4.0 nm @ 30 kV

• Stage

– Flipstage 3 with in situ STEM 3 detector

– 100 mm XY motion

• Easy Lift

• GIS

– Multi-Chem