2015 HITACHI CG6300

Process Type: CDSEM

Date of Manufacture: 2015

Equipment Information:

• Includes HDD/SW
• Installed

Configuration: Hitachi CG6300 CDSEM

E Chuck

ROI Scan

Fast Scan

Ergonomic Modifications

Circular Input Voltage Modification

UL Safety Modification

SE Gun Back up power supply

Ion pump back up power supply

SPM (Pre-focus only)

Multipoint Measurement

Gap Measurement

Corner Radius Measurement

Image Filing Function

Recipe Queue

ArF Package

Image info additional function to MSR file

Ax+B

Image Enhancement

Linie Width Analysis

Power Cable 15m

Optical Magnification (x100, x200)

Automatic Beam Alignment

BSE detection

2

Dry Pump I/F Unit "F"

3

5kV modification

4

Energy Filter

5

Flat Scan Function

6

200V option

7

New Edge Roughness Measurement

8

Line Width Analysis Roughness Function

9

DS/T-PC link connection License

10

GEM 300

11

Load Port N2 Front purge System

12

Standard Microscale

13

Bottom Surface Masking

14

MPPC

15

Scan Overlap Function

16

Alternate site remeasure function

17

Off Line Recipe Applying Function

18

HV Display Function

19

USB Memory Safety Function

20

Image Average for Template Generator

21

Via In Trench Inverse Function