2014 Plasmatherm LAPECVD
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Description
-PlasmaTherm LAPECVD (2014) 6-inch 5-wafer batch deposition system with LoadLock SiO2/SiN
Specifications
| Manufacturer | Plasmatherm |
| Model | LAPECVD |
| Year | 2014 |
| Condition | Used |
| Stock Number | BM6430 |