1988 AMAT P5000

Equipment Type   : P5000

Equipment

production time    : December, 1988

Wafer size   : 6inch

Wafer Type   :

Heater Type   :

Chamber Type  : DLH

Process Type   : TEOS

Missing Part List

FRONT

RIGHT LL assembly

LEFT LL assembly

controller box#1

SBC

VIDEO

STEPPER#4

DI/O#1

DI/O#2

DI/O#3

DI/O#4

controller box#2

TC gauge B/D#1

TC gauge B/D#2

12v PS

 +15V PS

 -15V PS

buffer I/O

AI MUX

OPTO#1

OPTO#2

CHOPPER DRIVE#1

CHOPPER DRIVE#2

CHOPPER DRIVE#3

CHOPPER DRIVE#4

Mainframe 상단

Storage Elevator motor

TM robot upper motor

TM robot lower motor

Chamber A

ATM switch

C.M gauge

C.M gauge

C.M gauge B/D

vent valve

RF matcher

Roughing valve

Throttle valve

gas mix & manifold assembly

heater

Chamber B

gas mix & manifold assembly

heater

GAS BOX

EXPANDED GAS PANEL INTERFACE B/D

Teos gas interface B/D