1993 AMAT P5000
1993 AMAT P5000
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Description
Equipment Type : P5000
Equipment
production time : 06-05-1993
Wafer size : 6inch
Wafer Type :
Heater Type : Susceptor
Chamber Type : DLH
Process Type : TEOS
Missing parts list:
controller box#1
SBC
controller box#2
+15V PS
OPTO#2
Chamber B
C.M gauge
AC BOX
CB4 LAMP/MAG A
Specifications
| Manufacturer | AMAT |
| Model | P5000 |
| Year | 1993 |
| Condition | Used |
| Stock Number | BM6448 |