2005 Evatec/ Balzers LLS EVO II

PVD (Physical Vapor Deposition)

Deposition Equipment

Date of Manufacture: 2005-01-01

Currently Configured for: 150mm

Chiller in Sub Fab

Notes:

1. One I/O beckoff card needs to be replaced (we have it in stock)

Date of Audit

11/25/2025

Fab Equipment ID

LLSSPUTTER001

Manufacturer (Make)

UNAXIS

Model

LLS EVO II

Serial Number

10173806

Wafer Size (inches)

6

Install Type: TTW / Stand-Alone

TTW

OEM MFG Date

2005

Install Date

1/1/2006

Date of Last PM

11/1/2024

Is System On-Line?

No

Off-Line Date (if applicable)

11/1/2024

Can Produce Wafers As-Is?

No (see notes)

CE Mark Certified?

Yes

Are any Manuals included?

Yes

Any Field Modifications?

No

All Cables present?

Yes

Any Corrosion visible on modules?

No

Any Missing / Damaged Parts?

 Yes (see note 1)

Shipping Brackets Included?

No

Robot Type

NA (manual loading)

Pre-Aligner?

No

Mini-Environment

No

System SW (OS) version

Windows XP SP3

System SW (App) version

V06R20

Log-In User Name

metal     PLCPC: llsnet

Log-In Password

metal1    PLCPC: unaxis

GEM / SECS?

Yes

Ethernet

Yes

Power Supply

400V 3L+N+PE

AC Dist Box

AC Cabinet

Ext Transformer

Yes (qty 3)

UPS

Yes Eaton 9130

Heat Exchanger / Chiller

No

Backing Pump(s)

Yes

Polycold

Yes

CDA

Yes

DIW

Yes

Vacuum

NA

Gas

ARGON, OXYGEN, N2

Power

400V 3L+N+PE