KLA Tencor Auto RS-75tc

KLA-TENCOR Auto RS-75TCA Resistivity Mapping Tool

 H2 Wafer Handling System

 Automatic Handling of 75mm – 200mm Wafers

 Resistivity Measurement Range: <5 mΩ/sq to >5 MΩ/sq

 Measurement Repeatability: <0.2% (1 sigma)

 Typical Measurement Time: 3.5 – 4.5 Seconds per Test Site

 Temperature Controlled 200mm Chuck with ±0.5ºC Accuracy

 X-Y Resistivity Mapping: Up to 1200 Sites Programmable

 Probe Qualification: 20 Sites

 1 - 30 Programmable Routine Test Sites (ASTM Standard Tests Included)

 PC Based System Controller

 Input Power 120VAC, 1Ph., 50/60Hz