2014 Yield Engineering 450PB6-2P High temperature vacuum oven for polyimide, photoresist and epoxy curing

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 Max Capacity: 2 cassettes of 150mm Wafers  

- Temperature Range: 25C to 450C

- Multiple Program Temperature Controller

- Power: 220V, 25 Amps, 50/60 Hz 3 phase +1G-Exhaust fan included

_Leybold Sogevac SV40 vacuum pump or equivalent-serial no. 89122Date of Manufacture 2014Option: Install Systech 913 Oxygen Analyzer $8500.

Polyimide and BCB curing requires a low oxygen environment (typically less than 20 ppm) to prevent discoloration (browning) and ensure optimal film transparency.

Oxygen contamination can lead to defects and impact the quality and performance of the cured polyimide layer.

YES's PB-Series ovens achieve low oxygen levels through a low-pressure vacuum cure process with a gentle, preheated laminar nitrogen flow.

Oxygen analyzer functionality

The oxygen analyzer monitors the oxygen concentration within the oven chamber.

If oxygen levels exceed the set point, the analyzer triggers the nitrogen purge to restore the inert atmosphere.

An oxygen analyzer and control system helps minimize nitrogen usage while ensuring consistent and repeatable curing processes.

Benefits

Provides real-time feedback on oxygen levels during the curing process.

Helps maintain optimal curing conditions for high-quality polyimide films.

Contributes to improved yield and reduced processing defects.