AMAT Endura 5500 Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Currently Configured for: 200mm

Turnkey Option is Available!

This system can be fully refurbished and reconfigured to meet customer specifications.

Software: v8.89

Mainframe: Endura 5500

Robot: HP with Fabworx Blade, Wrist, and Arms

Chambers:

Ch1 - Ti

Pedestal - A4 Clamped

Ch2/Ch3 - TiN

Pedestal - A101

Ch4 - AlCu

Pedestal - A4 Clamped

ChC/ChD - RF PCII

Pedestal - Quartz

ChE/ChF - Orient Degas

Auxiliaries:

Qty 1 - Neslab 3 HX

Qty 2 - CTI 9600 Cryo Compressor

Edwards IQDP40/QMB250 Rough Pump

MFCs:

Unit 1661 - 2

Horiba Z500 - 5

Stec 440 - 10