1996 AMAT P 5000 MxP+ Etcher

- 208 V, 50/60 Hz, 3 Phase

- Full Load Current: 120 Amps

- Largest Load Ampere Rating: 32 Amps

- Interrupt Current: 10,000 AMPS I.C.

- Cassette to Cassette

- Wafer Set Size: 6"

- Chamber A: MxP+ Etch

- Chamber B: MxP+ Etch

- Chamber C: MxP+ Etch

Chamber A:

- RF Generator: OEM-12 B

- RF Match

- Baratron: 1 Torr

- Throttle Valve

- Slit Valve: Standard

- Lift Pin

- Process Kit

- Edwards Turbo / Controller

Chamber B:

- RF Generator: OEM-12 B

- RF Match

- Baratron: 1 Torr

- Throttle Valve

- Slit Valve: Standard

- Lift Pin

- Process Kit

- Edwards Turbo / Controller

Chamber C:

- RF Generator: OEM-12 B

- RF Match

- Baratron: 1 Torr

- Throttle Valve

- Slit Valve: Standard

- Lift Pin

- Process Kit

- Edwards Turbo / Controller

Electrical Requirements:

- Line Frequency: 50/60 Hz

- Line Voltage: 200/208 V

- Line Amperage 120 Amps

System Monitor:

- 1st Monitor

- 2nd Monitor

- Mainframe:

- Mainframe Type: Standard

- Robot Type: MK II

- Load Lock Cassette: Manual 2 Cassette

- Storage Elevator: 29 slots

- Power Rack: Standard

1996 Vintage