2001 KLA Surfscan SP1 TBI Inspection System

8", 12"

- 208-240 V, Single phase

- 50/60 Hz

- Full Load Amps: 24 A

- Machine Main Breaker Rating: 30 A

- Ampere Rating of Largest Load: 12 A

- Open Vacuum Chuck Handler (200/300 mm)

- Bright Field (DIC) Option, P/N: 515990

- XY Coordination, P/N: 0082158-000

- Bright Field Sizing, P/N: 0082158-000

- Haze Normalization, Haze Analysis, P/N: 0081928-000

- SEC-1, P/N: 0021643-000

- HSMS, P/N: 528080

- PC-NFS Cient, P/N: 556025

- Desktop PC Software Option, P/N: 528170

- Color Printer Equivalent to HP Business Inkjet 2300, P/N: T 02379

・When loading with FixLoad, the handler reaches maximum speed, causing wafer misalignment due to recoil

・Laser (in use for 2 years)

・CD drive and FD drive damaged

・No issues with performance

2001 Vintage