AMAT Centura 5200 WxZ / Sprint W

Metal CVD (Chemical Vapor Deposition)

Deposition Equipment

Currently Configured for: 200mm

Software: B3919

Mainframe: Centura 5200

Robot: Single Blade

Qty 2 - WxZ

Qty 2 - Sprint W

Qty 1 - Multi-Slot Cooldown Chamber

MFCs: 25 Horiba SEC MFCs, 11 Units 1660 MFCs

Upgrades: Power glitch protection

Process Chuck Type/Material: Aluminum

Dry Pumps: Edwards QDP80/QMB250 stack qty 4, Edwards QDP80 qty 2

Heat Exchanger: AMAT Heatex 1

Abatement: Qty 2 - Delatech CDO Abatement