2005 Dainippon Screen Mfg. Co. (DNS) SS-80BW-AR

Wafer Scrubber

Etch/Clean - Wet Processing

Date of Manufacture: 2005-04-01

Currently Configured for: 200mm

Front/Backside Wafer Scrubber

Software: SYS Ver 394F

2 Reverser

3 Backside

3 frontside Soft Spray and Scrub

CO2 Sparged DIW

Chuck Type/Material: Stainless Steel/teflon, Nylon

MFC: 5 Horiba SEC-4600

Robot Type: DNS