2010 AMAT P-5000 Mark II MxP+ Dielectric

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Date of Manufacture: 2010-01-01

Currently Configured for: 150mm

NOTES:

1)     System initially configured for 100mm.   Converted to 150mm in 2012.

2)     Refurbished tool purchased from OEM Group, Inc.

3)     Center finder board retrofitted for transparent and opaque substrates.

4)     All chambers have the same MFC configuration.

PUNCH LIST:

1)     Verify light tower.

2)     Verify chillers

Wafer Size (inches)

6       NOTE 1

Install Type

Through-the-wall

Original Ship Date from AMAT

10/2009  NOTE 2

Software Version

5.01C

Date of Last PM

9/25/2025

Is System On-Line?

yes

CE Mark Certified?

Yes

OEM Audit Available?

No

Decontamination Report Exists?

No

Can Produce Wafers AS IS?

Yes

Any Known Field Modifications?

NOTE 3

All Cables Present?

Yes

System Configuration

Chamber Type

Position A

MxP

Position B

MxP

Position C

MxP

Position D

Orienter

Ch F (C)

Ch E (C) 

Ch D

Ch C

Ch B

Ch A

Gas 

Panel

Directory of Etch Chamber Types for Box 3

Process

Mark 1, Mark 2, MxP, or R2

Metal Etch

DPS R0, DPS R1, or DPS Plus

Metal Etch

Mark 1, Mark 2, MxP, or MxP+, eMxP+

Dielectric Etch

Super e, eMAX, or IPS

Dielectric Etch

RPS

Dielectric Etch

Mark 1, Mark 2, MxP, or MxP+

Silicon Etch

DPS Poly, DPS Deep Trench, or DPS Plus

Silicon Etch

PRSP / ASP / ASP+

Ash/Strip

Cooldown / Fast Cooldown

Cooldown

Wafer Orienter

Orienter

Electrostatic Chuck

Yes

Independent Backside He Cool

Yes

VDS (Vapor Delivery System)

No

Signal Lamp Tower

Yes

Bolt-On-SMIF

No

Clean Room Manuals

No

Standard Manuals

Yes

Remote Service Monitors

Yes

Phase 3 Robot

Yes

Phase 3 Cassette Handler 

Yes

Bolt-Down Lid

Yes

Storage Elevator

29 Slots

Expanded (20 Slot) VME

Yes

Floppy Drive Type

3 ½”

Mini-Controller

Yes

Gas Panel Type

28 line

CES Gas Panel

Yes

RF Match Type

Phase IV

Slit Liner Door

No

Lid Type

Boltdown

Autobias

yes

Endpoint

Standard

Chamber Liner

No

Cathode Type

Standard

Lid Gas Distribution

GDP

Stand Alone Endpoint System

No

RF Generator Rack

Yes

Remote Frame w/AC Box

Yes

Chamber Position / Turbo Mfgr. / Turbo Model

Position A / Varian / 301

Position B / Varian / 301

Position C / Varian / 301

Manufacturer

Edwards

Model

iH600

Quantity Required

3

Included With System

No

Manufacturer

Edwards

Model

80

Included With System

Yes

Model

HX150

Quantity Required

1

Included With System

Yes

Model

AMAT 0

Quantity Required

1

Included With System

Yes 

Gas Line # / Gas / Flow / MFC Mfgr. / MFC Model

(sccm) / 5850/

1 / Argon / 200 / Brooks / 5964

2 / O2 / 100 / Brooks / ditto

3 / CHF3 / 200 / Brooks / ditto

4 / NF3 HI / 250 / Brooks / ditto

5 / SF6 / 100 / Brooks / ditto

6 / CF4 / 200 / Brooks / ditto

7 / N2O LO / 50 / Brooks / ditto

9 / NOTE 4