2015 PVA TePla Giga 690 Plasma System

Short Description Microwave Plasma Cleaner

Date of Manufacture 2015

Operational Status (fully functional, repairs needed, any cannibalization) Fully functional

Electrical Power Configuration (voltage, phase) AC 230/400V, 3 Phase, 50/60Hz

Substrate Loading Configuration Load using magazine and Out using Magazine

Short Paragraph Describing this tool: Cleaning of advanced chip packages using oxygen or argon plasma

Process Configuration

Attribute (Chamber #, etc.) CDA ( 4 – 6 Bar )

Gas input O2 (1 – 3 Bar )

System Configuration

Modules / Features / Tool Options Qty

1 Transportsection 1

2 Chamber 1