1994 KLA-Tencor KLA 2133
1994 KLA-Tencor KLA 2133
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Description
Brightfield Inspection
Metrology Equipment
Date of Manufacture: 1994-02-01
Currently Configured for: 200mm
Patterned Defect Inspection
Software Version: 5.4.010
Robot Type: KLA Internal
Known Damaged/Missing Parts:
Several - Please Inspect
Specifications
| Manufacturer | KLA-Tencor |
| Model | KLA 2133 |
| Year | 1994 |
| Condition | Used |
| Stock Number | BM6608 |