KLA-Tencor Corp. KLA 5100XP

KLA-Tencor Corp. KLA 5100XP

Contact us for price

or
Call +353 (0) 87 192 1110

Description

Overlay Measurement System

Metrology Equipment

Currently Configured for: 200mm

Overlay & Registration

KLA 5100XP User Interface

Software Version: 14.70.01

Robot Type: KLA Internal

Handler: x3 Open Cassette

Show All

Specifications

ManufacturerKLA-Tencor Corp.
ModelKLA 5100XP
ConditionUsed
Stock NumberBM6610