1998 KLA-Tencor KLA 2138
1998 KLA-Tencor KLA 2138
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Description
Brightfield Inspection
Metrology Equipment
Date of Manufacture: 1998-05-01
Currently Configured for: 200mm
Patterned Defect Inspection
Software Version: 5.4.010
Robot Type: KLA Internal
Specifications
| Manufacturer | KLA-Tencor |
| Model | KLA 2138 |
| Year | 1998 |
| Condition | Used |
| Stock Number | BM6613 |