1998 KLA-Tencor KLA 2138

1998 KLA-Tencor KLA 2138

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Description

Brightfield Inspection

Metrology Equipment

Date of Manufacture: 1998-05-01

Currently Configured for: 200mm

Patterned Defect Inspection

Software Version: 5.4.010

Robot Type: KLA Internal

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Specifications

ManufacturerKLA-Tencor
ModelKLA 2138
Year1998
ConditionUsed
Stock NumberBM6613