2007 LAM Research Alliance (A6) TCP 9400DFM

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Date of Manufacture: 2007-12-31

Currently Configured for: 200mm

Transport Module / TCP9400DFM-P Modules for Tungsten Silicide Etch

Software: A4.0-37VM

PM2 - TCP9400DFM-P - Wsix Etch (s/n 94DFMP-N-006)

PM3 - TCP9400DFM-P - Wsix Etch (s/n 94DFM-845 (F115558-PM3) DOM 2008)

PM4 - TCP9400DFM-P - Wsix Etch (s/n 94DFM-846 (F115558-PM4) DOM 2008)

ESC - Anodized Aluminum

Interferometer EP - PM2, PM3 & PM4

Enhanced Universal Gas box - 12 Stick

PM2 Gas box : 

(10) - Brooks GF125

PM3 Gas box:

(8) - Unit 1661 Multiflow

(1) - Brooks GF100

(1) - Horiba Z300

PM4 Gas Box:

(9) - Unit 1661 Multiflow

(1) - Horiba Z300

Brooks Automation Mag 7

Dry Pumps:

Busch DS80 Cobra (3)

Busch BB100 (2)

Chillers:

TCU - Edwards 40/80 Plus (3)

RPM - Voltage SAG Enhanced