2014 LAM Research Alliance (A6) TCP 9400DFM

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Date of Manufacture: 2014-12-31

Currently Configured for: 200mm

Transport Module / TCP9400DFM-P Modules for Tungsten Silicide Etch

Software: A4.0-37VM

PM4 - TCP9400DFM-P - Wsix Etch

ESC - Anodized Aluminum

Interferometer EP - PM4 

Enhanced Universal Gas box - 12 Stick

PM4 Gas Box:

(10) - Brooks GF125

Brooks Automation Mag 7

Dry Pumps:

Busch DS80 Cobra (1)

Busch BA100 (2)

Chillers:

TCU - Edwards 40/80 Plus (1)

RPM - Voltage SAG Enhanced