LAM Research TCP 9600SE

Metal Etch

Etch/Ash/Clean - Plasma Processing

Currently Configured for: 200mm

Software: Envision 2.0-068

Main Chamber - Fixed Gap ESC - Metal Etch

ESC - Anodized Aluminum

VAT 65 Pressure Controller

Edwards 1303CV80 High Temp Turbo

PLL - DSQ Strip Chamber

APM - Atmospheric passivation

Heated Paddle (1)

Orbital Weld Gas Box

(2) - Unit 1661 Multiflow

(2) - Unit UFC 1200A

(2) - Horiba Z500

(1) - Mykrolis VC-4900VRH

Lam Harmonic arm drives (2)

Dry Pumps:

Busch BA100 (1)

Edwards iQDP80 (1)

Edwards iQDP80 w/Leybold WSU501 Blower (1)

Chillers:

M and W Single Ch TCU - RPCX28A-3.OHE-RNB

Remote AC Box

Ecosys 3500 Ultra Wet scrubber