TEL CLEAN TRACK ACT 12

Multi Block (Resist Coater/Developer)

Resist Processing Equipment

Currently Configured for: 300mm

Tool config is based on original PO, please verify tool details at tool inspection

Please refer to photos on tool Block Diagram

2-14 HCH 、3-11HCH 、3-12 HCH、3-13HCH、3-14HCH is not used at produciton

Reference- Tool is connected to Canon scanner FPA5500 IZ +

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales