2001 Karl Suss Microtec MA6 BA6 TSA BSA Mask Aligner

De-Installed.

Operational.

Removed HDD. Otherwise, it’s complete.

Vintage : 2001.

- Model: MA6

- Manufacturer: Suss MicroTec / Karl Suss

- Wafer Size: Small Pieces up to 6”/150mm Diameter Wafers

- Topside (TSA) Alignment

- Backside IR (BSA) Alignment

- Suss M306 Splitfield Microscope

- 1000W Lamp House

- CIC 1200 Power Supply

- Capable of Hard, Soft, Vacuum, and Proximity Contact with appropriate tooling

- Customer using Soft and Hard Contacts

- Vibration Isolation Table (for Suss MA6)

- 1 Chuck included

- 1 Maskholder

- System Power: 230V, 50/60 Hz

- Operations Manual for Suss MA6 Mask Aligner

- Fully Refurbished by Suss factory trained technicians