1998 Karl Suss Microtec MA6 BA6 TSA BSA Mask Aligner

Running in the fab. De-Installing by End of March or Early April.

Operational.

HDD will be removed when de-installing. Otherwise, it’s complete.

Vintage : 1998.

Model: MA6/BA6

- Manufacturer: Suss MicroTec / Karl Suss

- Wafer Size: Capable of Exposure on Small Pieces up to 6”/150mm Diameter Wafers depending on tooling

- Configured for Topside (TSA) Alignment and Bottom Side (BSA) Alignment

- Suss Splitfield Microscope

- UV400 Optics (for 365nm and 405nm exposure)

- Includes 5x, 10x, 20x objectives

- CIC Power Supply

- 1000W Lamphouse

- Capable of Soft, Hard, Proximity and Vacuum Contacts (depending on tooling)

- Includes (qty 1) Wafer Chuck included

- Includes (qty 1) Maskholder included

- Vibration Isolation Table (for Suss MA6)

- System Power: 230V, 50/60 Hz

- Operations Manual for Suss MA6 Mask Aligner

- Fully Refurbished by Suss factory trained technicians