2005 HITACHI CG4000

SEM - Critical Dimension (CD) Measurement

Metrology Equipment

Date of Manufacture: 2005-07-15

Currently Configured for: 300mm

HITA CG4000

Software version 35.43

Tool Excess Date2024-01-12

Tool Current StatusIn Production

Tool LocationCleanroom

Any modification/ conversion/ refrofit was perform to the tool?No

Any defective or missing partsNo

OEMHITA

Tool ModelCG4000

Software Version (include revision #)35.43