2004 Applied Materials NanoSEM 3D

Applied Materials NanoSEM 3D, 300mm wafers

Vintage : 2004

Process: Scanning Electron, CDSEM Measurement

Asset Description: MSEM761 (MSEM701) AMAT NANOSEM CD SEM (DICD) FEOL

Software version: 14.3

CIM: connected

Hardware Confguration (Fab)

System TypeDescriptionQTYStatusMain SystemSpinner Edge Cleaner1OK

Hardware Confguration (Subfab / Auxilliary Units)