Axcelis Fusion GEMINI GPL PLASMA ASHER/ ASHING SYSTEM

Unit's Specifics

Make: Axcelis

Model: Fusion Gemini GPL

Type: Resist Ashing System

Configuration:

• Dual Ashing Chambers
• (1) Coolplate Cassette Loading Stations equipped with Automatic Robot Handling
• Materials for etching: Photoresist
• Gases for use: O2/N2H2
• Endpoint Detection: Yes
• Etch Uniformity: <5%

Description

This unit is used, untested. As we do not have the technical expertise to further test the unit, we are selling it on an "AS IS BASIS".