Axcelis Technologies Inc. / Eaton Purion H200

High Current Implanter

Ion Implanters

Currently Configured for: 150mm

Tool is new, not installed.

em On-Line?Yes 

Can Produce Wafers As-Is ?No

CE Mark Certified ?Yes 

Are any Manuals included ?Std

OEM Audit Available?Yes

3rd Party Audit Available ?Yes

Decontamination Report Exists?No

Overall Tool Condition 

Any Field Modifications ?No

All Cables present ?Yes

Any Corrosion visible on modules ?No

Any Missing / Damaged Parts ?No

Shipping Brackets Included ?Yes 

Wafer HandlerYes

Handler Type 

# of Cassette / FOUP LoadersFOUP Loaders

End-Effecter Type150mm Single

Pre-Aligner ?Yes

Mini-EnvironmentYes

Handler Options ?150mm Hot chuck

System Software 

System SW (OS) versionWindows 10

System SW (App) version3.8.3.0.2

Log-In User NameSysadmin

Log-In Passwordsysadmin

SEMI Std Options (E84, E99, etc..)E84

HSMSYes

Supporting Equipment 

Ext TransformerNo

UPSNo

Heat Exchanger / ChillerChiller

Facility Requirements 

CDAYes

DIWYes

GasGN2,PN2,Ar

Power 480V 3phase 5Wire