1998 SEZ SP203 (SM202-6-B)

SP203 Mainunit: 6 Inch Bernoulli Handling; Pinlesschuck 6 Inch; Exhaust Up; 1 Medium Double Hex; 2 Medium Single Hex; Software: Major Version 117; Minor Version 2015.08.21; Gem Version GEM 5.8;

3 Chemistry Cabinetts: Cabinett 1: Maintank and Buffertank; Cabinett 2: Maintank and Buffertank; Cabinett 3:

Maintank; Chemistry Controller-Dos

Wafer Size Range

Minimum: 150 mm

Maximum:150 mm

Set Size: 150 mm

Problems: Keyboard switching; voltage fluctuations; chemistry-cabinets heavily used; chemistry computer not original; modifications; FFU controller; 1 cabinet drain box repaired;

• No Spare Parts available

Description SP203 with 3 Chemisty Cabinets

Accessories ISIS Controller (2.0.0.06.38-0159) and Measuring head (SN 2.0.0.07.14_01557)

Cables are no longer available.

Other Information  The Tool was modified to allow the chemistry to be applied over it

Power Requirements 200-208 V   50.0 A   50/60 Hz   3 Phase

Year of Manufacture 1998

Condition Fair