2020 Canon FPA-3030 i5+

i-Line Stepper

Lithography Equipment

Date of Manufacture: 2020-11-01

Currently Configured for: 150mm

Request OEM Report

Notes: 

Equipment impacted by a CDA event that allowed excessive moisture to enter the tool through the CDA supply line. 

Equipment considered as parts sale only due to this.

CDA Lines showed water droplets at virtually all major and sensitive units.

Started purging at CDA source to stepper, and level of contamination was beyond initial thoughts.

CDA lines went from showing water droplets, to fully saturated.

After discovering water as more than just droplets in CDA lines & large amounts accumulated in low

areas and near some fittings, decision to disassemble regulator & gauge panel.

CDA purging of individual lines went from sprays of water, to water flows & streams of water shooting

from the piping when pressure applied.

Moisture absorbent pads were positioned around the stepper to contain the large amounts of water.

These large accumulations of water were found at the:

regulator panel, wafer stage and damper distribution box, & at the Ulens purging distribution box.

Water was also found in the piping at the top of the chamber above the HEPA filters

For the most critical area, Ulens purging. Large amounts of water were found in piping.

All 4 lines to the Ulens contained water.

Cannon has no field procedure to determine what has entered the Ulens, but must make the assumption

that with water in the piping to the Ulens purge, water is likely inside the Ulens.

Stepper will be reassembled, as Canon feels no further need to look for contamination at the CDA

cooling supplied for the exposure shutter, masking blade unit, and illuminator.

Date of Audit

9/30/2025

Model

FPA-3030i5+

Wafer Size (inches)

6

Install Type: TTW / Stand-Alone

Stand-Alone

OEM MFG Date

2020

Install Date

2020

Is System On-Line?

NO

Off-Line Date (if applicable)

6/28/2024

Can Produce Wafers As-Is ?

NO

CE Mark Certified ?

YES

Are any Manuals included ?

Partial

OEM Audit Available?

YES

3rd Party Audit Available ?

NO

Decontamination Report Exists?

YES

Any Field Modifications ?

NO

All Cables present ?

YES

Any Corrosion visible on modules ?

YES

Any Missing / Damaged Parts ?

YES

Shipping Brackets Included ?

YES

Wafer Handler

YES

Handler Type

SiC Handling

# of Cassette / FOUP Loaders

Cassette Stage

Robot Type

OEM

End-Effecter Type

OEM

Pre-Aligner ?

YES

Mini-Environment

YES

Handler Options ?

SiC substrate

GEM / SECS ?

Yes

HSMS

Yes

Supporting Equipment

Std OEM items

CDA

N2

DIW

Chilled Water

Vacuum

Yes

Gas

NA

Power 

200 3-phase 102A