2010 Specialty Coating Systems Spincoat G3P-8 Photoresist Coater with 8 Inch Diameter Bowl

Manufacture 2010

System Features

Compact enclosure size

8 inch bowl for maximum 6x6 substrate

Fast, simple programming by means of microprocessor-based control

Front flat panel LCD display and keypad

Close loop servomotor for precise speed regulation

Communication port for external control using optional PC interface software for programming, profile storage, PID, diagnostics, vacuum on/off, slow speed centering, and programmable house position.

Stores and executes up to 30 programs, with up to 20 steps each (unlimited w/ optional software)

Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing increments, and 1.0 second increments for dwell time.

Precise repeatability from cycle to cycle

Encoder allows vacuum chuck to be stopped at a Home position

Chemically resistant Teflon coated bowl with integral drain

Hinged, interlocking cover

Safety glass window

Specifications

Bowl Diameter 8in

Rotational Speed

0-9,999 RPM

Acceleration/Deceleration

Ramp times from 0.1 to 25.5 seconds, in 0.1 second increments

Dwell Time

0 to 999 seconds in 1 second increments

Dispense Time

0 to 25.5 seconds in 0.1 second increments

Power Input

115/230 VAC, 50/60 Hz, 1Ø

Vacuum Input

Minimum 17 in Hg / 430 mm Hg, (~ -8.3 psig); Maximum 25 in Hg / 635 mm Hg (~ -12.3 psig); O.D. fitting: 0.25 in / 0.635 mm

Purge Input

0.55 CFM at 5 psi / 14.15 CLM at 0.35 kg/cm2 air or nitrogen (with optional internal vacuum: 2.2CFM, 60 psi)