Condition: “As is”

Date of manufacture: 11/2017

Wafer size Solar Wafer Inspection System

AMAT / APPLIED MATERIALS Vericell HT (High Throughput) is a Mask & Wafer Inspection Equipment that supports

microlithography operations, including high-throughput production and research & development. The system is

designed to provide rapid, accurate imaging and analysis of micro-devices. The unit offers integrated pattern

recognition, defect categorization and measurement capabilities, enabling researchers and technicians to

quickly and accurately characterize device quality, yield, and reliability. It also supports a variety of image

processing, measurement and analysis functions. AMAT Vericell HT uses advanced optical imaging, automated

defect inspection, as well as comprehensive pattern recognition capabilities to provide a comprehensive and

automated device inspection suite. The machine is fully featured and user-friendly, with a large touchscreen

monitor and graphical user interface. It supports automated exposure, light calibration, and image data

acquisition for a wide range of sample types, including thin films, substrates, and complex patterned

semiconductor devices. APPLIED MATERIALS Vericell HT's analytical capabilities include multiple image

processing modules, high-resolution defect inspection and analysis, and advanced pattern recognition. It uses

intuitive controls, adjustable settings, and high-speed data processing. The tool's advanced defect detection

capabilities help identify subtle defects, production variations, and other problematic features, which may result

in process or yield problems. It provides not only detection of critical defects, but also comprehensive defect

analysis, enabling users to identify and remediate process issues. Additionally, the asset is equipped with active

metrology functions, allowing users to conduct on-the-fly performance checks, analysis of device parameters,

and on-site inspection for process improvement. Overall, Vericell HT is a versatile and powerful mask & wafer

inspection model with an array of features and capabilities, enabling users to inspect micro-devices quickly,

accurately, and with minimal operator effort. It is designed to improve process reliability and yields, making it an

efficient tool for mask & wafer manufacturing.

2017 Applied Materials VERICELL HT