2003 Nikon NSR-SF200

- Vintage: 2003

- Condition: Initial Condition

-Configuration

. Manufacture: Nikon Precision

. Model: SF200

. Wafer size: 150mm

. Handedness: Inline left or right

configuration available

. Altitude : Varies by site

. Chamber type: Standard

. Chamber temperature set point:

. Variable numerical aperture: Max 0.63

. sPURE

. Options - Resolution Enhancement Technology (RET)

. RET apertures iNA=

0.50, 0.38, 0.24, 0.19, 0.12, 0.38(Annual)

. Quick Reticle Change (QRC)

. Reticle Size: 6 inches

. Reticle Barcode Reader - Options

. Field Image Alignment system (FIA)

. Laser Step Alignment system (LSA)

. Phase Contrast FIA

. TTLFC2

. Pre-alignment 2

. Wafer stage: Air Bearing/Linear Motors

. Ceramic wafer holder

. wafer loader

. Chip leveling included

. Multipoint Focus/Level

. Extended wafer carrier table - Options

. Pellicle particle detector - Options

. Online

. Nikon SECS II GEM interface

. Gigaphoton KrF Excimer Laser Source