2020 Kokusai DJ-1260VN-DF MT-SiOCN Furnace

Condition: “As is”  

Date of manufacture: 17-09-2020 (only 1 year used in R&D environment) 

Wafer size 300mm / Complete machine incl Drypumps, Scrubber and new process kit

QUIXACEI®-Ⅱ is a KOKUSAI ELECTRIC’s latest

platform for batch thermal processing of 300mm

wafers. QUIXACEI®-Ⅱ offers high throughput by

utilizing advanced technologies in such areas as

temperature control, wafer handling automation,

reactor purging.

Features

•Achieved high productivity: Improved 1.25times(*)

larger lot processing in a time (* Compared with

previous model)

•Capable of conformal films into deep trench

•Realized high accurate, high quality film deposition

in low temperature

•Health check function (Option)