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2003 AMAT Endura 300

2003 AMAT Endura 300

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Description

The system is complete, fully operational, and is under an AMAT service contract. It's still installed and was used exclusively for R&D, so it has very minimal runtime

-300mm

-2003 vintage

-Chuck Type: SLTESC

-Chamber 1: Ta - SiP

-Chamber 2: Cu - SiP

-Chamber 3: Al - Standard

Specifications

ManufacturerAMAT
ModelEndura 300
Year2003
ConditionUsed
Stock NumberBM6810