2003 AMAT Endura 300

The system is complete, fully operational, and is under an AMAT service contract. It's still installed and was used exclusively for R&D, so it has very minimal runtime

-300mm

-2003 vintage

-Chuck Type: SLTESC

-Chamber 1: Ta - SiP

-Chamber 2: Cu - SiP

-Chamber 3: Al - Standard