Lam Research 4528i Oxide Etch (Envision SW)

Condition: “As is”  

Date of manufacture: Refubished 2023 incl upgraded ENI Paramount RF Generators 

Wafer size 200mm

Tool Model : 4528i

Bulkhead system mount w/tunnel covers

Hine 38A open cassette Send/Receive indexers

Software Version: Envision 1.5.2

Oxide etcher, 8”

Clamp type, ESC

RF power Rack ENI Paramount 1213 Paramount MF 3KW

AE Isotropic Module

Chiller Unit (LAM 2080)

AC Rack AC Power Distribution

Moving gap

Back Helium Colling

Main Power 208V, 3 Phase, 5Wire, 175A, 60/

Belt driven load station

Standard load station shuttle spatula

Upper chamber gap drive encoder

Dip PCB for RF power tuning

Aluminum upper chamber electrode

Single lower chamber endpoint detector (405/520nm) Non-

-heated endpoint window

Low pressure chamber manifold

HPS valve for chamber isolation

AC--2 chamber pressure control

Lower chamber RGA port

8 -- Gas box Orbital gas box

Gas 1: AR 500 sccm

Gas 2: CF4 200 sccm

Gas 3: CHF3 100 sccm

Gas 4: SF6 100 sccm

Gas 5: N2 100 sccm

Gas 6: H2 1000 sccm

Gas 7 NF3 1000 sccm

Gas 1-: O2 100sccm

UPC: He (50 sccm)

AC input box for AC power inlet

Trip breakers AC/DC power box