2006 KLA-Tencor Viper 2435

Vintage: 2006

Process: Inspection tool

Tool status: Disconnected

Software version: Windows

CIM: linked

Hardware Configuration (Fab):

Main system: Main tool- 1 

Main System: Review Module- 1

Handler systems: Wafers transfer robot- 1

Load Port- 3 

Wafer size: 300mm