2014 LAM Research Corp. INOVA

Vintage 2014

Wafer size: 300mm

MDX83x, underutilized in FAB8, considered for FAB1 transfer

Software Version: 5.65

CIM: SECS/GEM

Process: TFM_Cu Barrier Seed_Novellus

Hardware Configuration (Fab):

Main System: LAM INOVA NExT- 1

Handler System: Standard Automation and Software- 1

Factory Interface: FOUP- 3

Options System: CH1 - HCM Cu ALP- 1

Options System: CH5 - HCM Ta IONX- 1

Options System: CH7 - HCM Cu ALP- 1

Options System: LDG - Degas- 1

Options System: CH4 - Cool Station- 1

Options System: RDG - Degas- 1

Options System: CH3 - HCM Ta IONX- 1