2011 LAM Research Corp. Vector Express

Vintage 2011 (multiple units available)

Wafer size: 300mm

Software version: 6.07B93_2.30B36

CIM: E84, SECS/GEM, GEM300, Interface A

Process: TFM_Ashable HM Amorphous Carbon

Hardware Configuration (Fab):

Main System: Vector Express AHMxT System- 1

Handler System: FOUP RF ID Reader- 2

Factory Interface: FOUP- 3

Options System: EBR Capable Loadlock- 1

Options System: First in FAB Kit Vector Express AHMxT- 1

Options System: Secondary Isolation Kit- 1

Options System: High Temperature Process Kit- 1

Options System: Heated Process Manometer- 1

Options System: Ionizer Kit- 1