2000 AMAT ENDURA 5500

Not been used since installation and are in excellent condition, with no missing parts or known issues.

• Process Chambers: 5 + 1
• AC Rack: 1
• System Rack: 1
• Generator Racks: 2
• Chillers: 2
• Cryo Compressors: 3
• Dry Pump: 1
• UPS: 1