2023 ASM A400 DUO

Complete, installed, and set up for 200mm

Never used or put into production.

ASM A400 DUO Details:

-ASM A400 Duo AP/LP - Annealing process

-A400 DUO Reactor module for Atm Anneal with Fast Ramp

-A400 DUO Reactor module for LP with Fast Ramp

Sub Tools:

1. x1 Fortrend Plus 500F

2. x1 EV-X200 Ebara Pump

Configuration

Tool comes with 2 chambers configurations , low pressure and Atmospheric . Batching of 48 wafers and 120 wafers.

OEM Model Description

The ASM A400 DUO Die Sorter is a machine developed by ASM Assembly Systems, a division of ASM Pacific Technology Ltd., a leading supplier of semiconductor assembly and packaging equipment. The A400 DUO Die Sorter is designed for the high-speed sorting and handling of semiconductor dies, which are individual integrated circuit components.