LAM Research 4528XL Oxide Etch

Condition: “As is”  

Date of manufacture: +/- 1999 Upgraded to 200mm 2023 incl Paramount Plus RF Generators

Wafer size 200mm   

Bulkhead system mount w/tunnel covers

Hine 38A open cassette Send/Receive indexers

Software Version: Envision 1.6.1-005

Oxide etcher, 8”

Clamp type, ESC

RF power Rack ENI Paramount Plus VHF3027 / MF5002

Chiller Unit ( LAM2080 )

AC Rack AC Power Distribution

Moving gap

Back Helium Colling

Main Power 208V, 3 Phase, 5Wire, 175A, 60/

Belt driven load station

Standard load station shuttle spatula

Upper chamber gap drive encoder

Aluminum upper chamber electrode

Single lower chamber endpoint detector (405/520nm)

Non--heated endpoint window

VAT 65 valve for chamber isolation

AC--2 chamber pressure control

8 -- Gas box Orbital gas box

Gas 1: AR 500 sccm

Gas 2: CF4 100 sccm

Gas 3: CHF3 100 sccm

Gas 4: C4F8 20 sccm

Gas 5:

Gas 6: O2 Low 20 sccm

Gas 7 O2 High 1000 sccm

Gas 8: N2 100 sccm

UPC: He (50 sccm)

AC input box for AC power inlet

Trip breakers AC/DC power box