LAM Research 4520XL Oxide

Condition: “As is” 

Date of manufacture: Refurbished in 2011 including dual monitor upgrade

​Wafer size 150mm

Bulkhead system mount w/tunnel covers

Dual monitor upgrade

Hine 38A open cassette Send/Receive indexers

Software Version: Envision

Oxide etcher, 6”

Clamp type, ESC

RF power Rack 2x ENI Gemini RF Generator

Chiller Unit LAM2080

AC Rack AC Power Distribution

Moving gap

Back Helium Cooling

Main Power 208V, 3 Phase, 5Wire, 175A, 60/

Belt driven load station

Standard load station shuttle spatula

Upper chamber gap drive encoder

Aluminum upper chamber electrode

Single lower chamber endpoint detector (405/520nm) Non-

-heated endpoint window

HGP Punp/Controller and VAT 65 ISO Valve

AC--2 chamber pressure control

Lower chamber RGA port

8 -- Gas box Orbital gas box

Gas 1: AR 500sccm

Gas 2: CF4 20 sccm

Gas 3: CHF3 20 sccm

Gas 4: CHF8 20 sccm

Gas 5: CO 200 sccm

Gas 6: O2 low 20 sccm

Gas 7 O2 High 1000 sccm

Gas 8: N2 100sccm

UPC: He (50 sccm)

AC input box for AC power inlet

Trip breakers AC/DC power box